Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12119243 | Plasma etching chemistries of high aspect ratio features in dielectrics | Samantha Tan, Yang Pan, Jeffrey Marks | 2024-10-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12119243 | Plasma etching chemistries of high aspect ratio features in dielectrics | Samantha Tan, Yang Pan, Jeffrey Marks | 2024-10-15 |