Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12080562 | Atomic layer etch and ion beam etch patterning | Samantha Tan, Wenbing Yang, Girish Dixit, Yang Pan | 2024-09-03 |
| 11935758 | Atomic layer etching for subtractive metal etch | Wenbing Yang, Mohand Brouri, Samantha Tan, Shih-Ked Lee, Yiwen FAN +3 more | 2024-03-19 |