Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12080562 | Atomic layer etch and ion beam etch patterning | Samantha Tan, Tamal Mukherjee, Wenbing Yang, Yang Pan | 2024-09-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12080562 | Atomic layer etch and ion beam etch patterning | Samantha Tan, Tamal Mukherjee, Wenbing Yang, Yang Pan | 2024-09-03 |