Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12148614 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Takuya JODA, Arito OGAWA, Norikazu Mizuno, Shogo HAYASAKA | 2024-11-19 |
| 12148621 | Method of processing substrate, method of manufacturing semiconductor device, recording medium, and substrate processing apparatus | Arito OGAWA, Atsuro SEINO | 2024-11-19 |
| 12139787 | Apparatus and method for cleaning reaction vessel for processing substrate | Shinya Ebata, Takaaki Noda | 2024-11-12 |
| 12065736 | Cleaning method, method of manufacturing semiconductor device, and substrate processing apparatus | Naoya Miyashita, Tomoshi Taniyama | 2024-08-20 |
| 12053805 | Method of cleaning member in process container, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kenji Kameda, Tsukasa Kamakura, Takeo Hanashima, Hiroaki Hiramatsu, Shinya Ebata +5 more | 2024-08-06 |