Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12065741 | Substrate processing apparatus and method of manufacturing semiconductor device | Mikio Ohno, Atsushi UMEKAWA, Takeo Hanashima | 2024-08-20 |
| 12053805 | Method of cleaning member in process container, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Koei KURIBAYASHI, Kenji Kameda, Tsukasa Kamakura, Takeo Hanashima, Shinya Ebata +5 more | 2024-08-06 |
| 11967501 | Substrate processing apparatus and method of manufacturing semiconductor device | Shuhei Saido, Takuro USHIDA | 2024-04-23 |
| 11952664 | Substrate processing apparatus and method of manufacturing semiconductor device | Hidenari Yoshida, Takeo Hanashima | 2024-04-09 |