Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12065741 | Substrate processing apparatus and method of manufacturing semiconductor device | Mikio Ohno, Atsushi UMEKAWA, Hiroaki Hiramatsu | 2024-08-20 |
| 12053805 | Method of cleaning member in process container, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Koei KURIBAYASHI, Kenji Kameda, Tsukasa Kamakura, Hiroaki Hiramatsu, Shinya Ebata +5 more | 2024-08-06 |
| 12040179 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takaaki Noda, Kotaro Konno, Shingo NOHARA | 2024-07-16 |
| 11952664 | Substrate processing apparatus and method of manufacturing semiconductor device | Hidenari Yoshida, Hiroaki Hiramatsu | 2024-04-09 |
| 11923188 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | — | 2024-03-05 |