Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12065741 | Substrate processing apparatus and method of manufacturing semiconductor device | Atsushi UMEKAWA, Takeo Hanashima, Hiroaki Hiramatsu | 2024-08-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12065741 | Substrate processing apparatus and method of manufacturing semiconductor device | Atsushi UMEKAWA, Takeo Hanashima, Hiroaki Hiramatsu | 2024-08-20 |