Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12148611 | Substrate processing method, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Tomoki IMAMURA, Kazuyuki Okuda, Masato Terasaki | 2024-11-19 |
| 12139787 | Apparatus and method for cleaning reaction vessel for processing substrate | Shinya Ebata, Koei KURIBAYASHI | 2024-11-12 |
| 12040179 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kotaro Konno, Shingo NOHARA, Takeo Hanashima | 2024-07-16 |
| 11972934 | Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus, and recording medium | Tomoki IMAMURA, Kazuyuki Okuda, Masato Terasaki | 2024-04-30 |