Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12148611 | Substrate processing method, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takaaki Noda, Tomoki IMAMURA, Kazuyuki Okuda | 2024-11-19 |
| 11972934 | Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus, and recording medium | Tomoki IMAMURA, Takaaki Noda, Kazuyuki Okuda | 2024-04-30 |