Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12148611 | Substrate processing method, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takaaki Noda, Kazuyuki Okuda, Masato Terasaki | 2024-11-19 |
| 12142476 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Masayuki Asai, Kazuyuki Okuda, Yasuhiro Inokuchi, Norikazu Mizuno | 2024-11-12 |
| 11972934 | Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus, and recording medium | Takaaki Noda, Kazuyuki Okuda, Masato Terasaki | 2024-04-30 |