Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12142476 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Masayuki Asai, Tomoki IMAMURA, Kazuyuki Okuda, Norikazu Mizuno | 2024-11-12 |
| 11915927 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Kazuyuki Okuda, Syuzo SAKURAI, Masayoshi Minami | 2024-02-27 |