Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11915927 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Kazuyuki Okuda, Syuzo SAKURAI, Yasuhiro Inokuchi | 2024-02-27 |
| 11885016 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus and recording medium | Kazuhiro Harada, Shintaro Kogura | 2024-01-30 |