Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12148611 | Substrate processing method, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takaaki Noda, Tomoki IMAMURA, Masato Terasaki | 2024-11-19 |
| 12142476 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Masayuki Asai, Tomoki IMAMURA, Yasuhiro Inokuchi, Norikazu Mizuno | 2024-11-12 |
| 11972934 | Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus, and recording medium | Tomoki IMAMURA, Takaaki Noda, Masato Terasaki | 2024-04-30 |
| 11915927 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Syuzo SAKURAI, Yasuhiro Inokuchi, Masayoshi Minami | 2024-02-27 |