Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12170206 | Method of processing substrate, method of manufacturing semiconductor device, recording medium, and substrate processing apparatus | Arito OGAWA, Atsuhiko Ashitani, Atsuro SEINO, Kota KOWA | 2024-12-17 |
| 12148614 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Takuya JODA, Arito OGAWA, Shogo HAYASAKA, Koei KURIBAYASHI | 2024-11-19 |
| 12142476 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Masayuki Asai, Tomoki IMAMURA, Kazuyuki Okuda, Yasuhiro Inokuchi | 2024-11-12 |