Issued Patents 2024
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12170206 | Method of processing substrate, method of manufacturing semiconductor device, recording medium, and substrate processing apparatus | Norikazu Mizuno, Atsuhiko Ashitani, Atsuro SEINO, Kota KOWA | 2024-12-17 |
| 12148621 | Method of processing substrate, method of manufacturing semiconductor device, recording medium, and substrate processing apparatus | Koei KURIBAYASHI, Atsuro SEINO | 2024-11-19 |
| 12148614 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Takuya JODA, Norikazu Mizuno, Shogo HAYASAKA, Koei KURIBAYASHI | 2024-11-19 |
| 12139792 | Substrate processing apparatus, substrate processing method, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | — | 2024-11-12 |
| 12084760 | Method of processing substrate, recording medium, substrate processing apparatus, and method of manufacturing semiconductor device | Takuya JODA, Atsuro SEINO | 2024-09-10 |
| 12084757 | Method of manufacturing semiconductor device, substrate processing apparatus, method of processing substrate, and recording medium | Atsuro SEINO | 2024-09-10 |
| 12080555 | Method of manufacturing semiconductor device, non-transitory computer-readable recording medium and substrate processing apparatus | — | 2024-09-03 |
| 11967500 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Atsuro SEINO | 2024-04-23 |
| 11915938 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Atsuro SEINO | 2024-02-27 |
| 11908737 | Method of manufacturing semiconductor device, substrate processing apparatus and recording medium | — | 2024-02-20 |