Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12148614 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Arito OGAWA, Norikazu Mizuno, Shogo HAYASAKA, Koei KURIBAYASHI | 2024-11-19 |
| 12084760 | Method of processing substrate, recording medium, substrate processing apparatus, and method of manufacturing semiconductor device | Arito OGAWA, Atsuro SEINO | 2024-09-10 |
| 12087598 | Substrate processing apparatus | Hideto Tateno, Daisuke Hara, Masahisa Okuno, Takashi Tsukamoto, Akinori Tanaka +2 more | 2024-09-10 |
| 12000045 | Method of manufacturing semiconductor device, non-transitory computer-readable recording medium, substrate processing apparatus and substrate processing method | Yukinao KAGA, Yoshimasa NAGATOMI | 2024-06-04 |