Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12000045 | Method of manufacturing semiconductor device, non-transitory computer-readable recording medium, substrate processing apparatus and substrate processing method | Takuya JODA, Yukinao KAGA | 2024-06-04 |
| 11970771 | Vaporizer, substrate processing apparatus and method for manufacturing semiconductor device | Atsushi Morikawa, Masakazu Shimada, Takeshi Kasai, Kenichi Suzaki, Hirohisa Yamazaki | 2024-04-30 |
| D1020668 | Gas injector for substrate processing apparatus | Toru Kagaya | 2024-04-02 |