Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11970771 | Vaporizer, substrate processing apparatus and method for manufacturing semiconductor device | Atsushi Morikawa, Masakazu Shimada, Kenichi Suzaki, Hirohisa Yamazaki, Yoshimasa NAGATOMI | 2024-04-30 |