Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11970771 | Vaporizer, substrate processing apparatus and method for manufacturing semiconductor device | Atsushi Morikawa, Masakazu Shimada, Takeshi Kasai, Hirohisa Yamazaki, Yoshimasa NAGATOMI | 2024-04-30 |
| 11929272 | Substrate processing apparatus, substrate support, and method of manufacturing semiconductor device | — | 2024-03-12 |
| 11873555 | Vaporizer, substrate processing apparatus and method of manufacturing semiconductor device | Gen Li, Hirohisa Yamazaki | 2024-01-16 |
| 11866822 | Vaporizer, substrate processing apparatus, and method of manufacturing semiconductor device | Hirohisa Yamazaki, Ryuichi Nakagawa, Yasunori EJIRI | 2024-01-09 |