Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11866822 | Vaporizer, substrate processing apparatus, and method of manufacturing semiconductor device | Hirohisa Yamazaki, Kenichi Suzaki, Yasunori EJIRI | 2024-01-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11866822 | Vaporizer, substrate processing apparatus, and method of manufacturing semiconductor device | Hirohisa Yamazaki, Kenichi Suzaki, Yasunori EJIRI | 2024-01-09 |