Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12000045 | Method of manufacturing semiconductor device, non-transitory computer-readable recording medium, substrate processing apparatus and substrate processing method | Takuya JODA, Yoshimasa NAGATOMI | 2024-06-04 |
| 11876010 | Substrate processing apparatus and recording medium | Tadashi Okazaki, Hajime ABIKO, Tomoyuki Miyada | 2024-01-16 |