Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11876010 | Substrate processing apparatus and recording medium | Hajime ABIKO, Tomoyuki Miyada, Yukinao KAGA | 2024-01-16 |
| 11869785 | Method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Tomoyuki Miyada, Hajime ABIKO, Junichi KAWASAKI | 2024-01-09 |