Issued Patents 2024
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12170206 | Method of processing substrate, method of manufacturing semiconductor device, recording medium, and substrate processing apparatus | Arito OGAWA, Norikazu Mizuno, Atsuhiko Ashitani, Kota KOWA | 2024-12-17 |
| 12148621 | Method of processing substrate, method of manufacturing semiconductor device, recording medium, and substrate processing apparatus | Koei KURIBAYASHI, Arito OGAWA | 2024-11-19 |
| 12084757 | Method of manufacturing semiconductor device, substrate processing apparatus, method of processing substrate, and recording medium | Arito OGAWA | 2024-09-10 |
| 12084760 | Method of processing substrate, recording medium, substrate processing apparatus, and method of manufacturing semiconductor device | Takuya JODA, Arito OGAWA | 2024-09-10 |
| 11967500 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Arito OGAWA | 2024-04-23 |
| 11915938 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Arito OGAWA | 2024-02-27 |