Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12170206 | Method of processing substrate, method of manufacturing semiconductor device, recording medium, and substrate processing apparatus | Arito OGAWA, Norikazu Mizuno, Atsuhiko Ashitani, Atsuro SEINO | 2024-12-17 |