Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D1053156 | Furnace for substrate processing apparatus | Takatomo Yamaguchi, Daiki Kimoto | 2024-12-03 |
| 12087598 | Substrate processing apparatus | Daisuke Hara, Masahisa Okuno, Takuya JODA, Takashi Tsukamoto, Akinori Tanaka +2 more | 2024-09-10 |
| 11869764 | Substrate processing apparatus, substrate processing method and non-transitory computer-readable recording medium | Akinori Tanaka, Sadayoshi Horii | 2024-01-09 |