Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12087598 | Substrate processing apparatus | Hideto Tateno, Daisuke Hara, Masahisa Okuno, Takuya JODA, Takashi Tsukamoto +2 more | 2024-09-10 |
| 11869764 | Substrate processing apparatus, substrate processing method and non-transitory computer-readable recording medium | Akinori Tanaka, Hideto Tateno | 2024-01-09 |