Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12087598 | Substrate processing apparatus | Hideto Tateno, Daisuke Hara, Masahisa Okuno, Takuya JODA, Takashi Tsukamoto +2 more | 2024-09-10 |
| 12014943 | Method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Shinji Yashima, Masahiro Miyake | 2024-06-18 |
| 11906367 | Substrate temperature sensor, substrate retainer and substrate processing apparatus | Tokunobu Akao, Hitoshi Murata, Masaaki Ueno | 2024-02-20 |
| 11880213 | Substrate liquid processing apparatus and substrate liquid processing method | Mikio Nakashima, Nobuhiro Ogata, Isamu Miyamoto | 2024-01-23 |
| 11869764 | Substrate processing apparatus, substrate processing method and non-transitory computer-readable recording medium | Hideto Tateno, Sadayoshi Horii | 2024-01-09 |