Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11905603 | Substrate processing method and substrate processing apparatus | Takashi Nakazawa, Keigo Satake, Kenji Nakamizo | 2024-02-20 |
| 11880213 | Substrate liquid processing apparatus and substrate liquid processing method | Mikio Nakashima, Akinori Tanaka, Nobuhiro Ogata | 2024-01-23 |