Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12050138 | Substrate processing apparatus, and thermocouple | Akihiro Osaka, Hideto Yamaguchi, Tetsuya Kosugi, Atsushi UMEKAWA, Motoya Takewaki | 2024-07-30 |
| 11906367 | Substrate temperature sensor, substrate retainer and substrate processing apparatus | Hitoshi Murata, Akinori Tanaka, Masaaki Ueno | 2024-02-20 |