Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12050138 | Substrate processing apparatus, and thermocouple | Hideto Yamaguchi, Tetsuya Kosugi, Tokunobu Akao, Atsushi UMEKAWA, Motoya Takewaki | 2024-07-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12050138 | Substrate processing apparatus, and thermocouple | Hideto Yamaguchi, Tetsuya Kosugi, Tokunobu Akao, Atsushi UMEKAWA, Motoya Takewaki | 2024-07-30 |