Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12050138 | Substrate processing apparatus, and thermocouple | Akihiro Osaka, Hideto Yamaguchi, Tetsuya Kosugi, Tokunobu Akao, Atsushi UMEKAWA | 2024-07-30 |
| 11913116 | Substrate processing apparatus and method of manufacturing semiconductor device | Tomoshi Taniyama | 2024-02-27 |