Issued Patents 2024
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12123091 | Substrate processing apparatus and method of manufacturing semiconductor device | Takayuki Nakada, Takashi Nogami, Daigi KAMIMURA | 2024-10-22 |
| 12116666 | Substrate processing apparatus and method of manufacturing semiconductor device | Daigi KAMIMURA, Takeshi Ito | 2024-10-15 |
| 12065736 | Cleaning method, method of manufacturing semiconductor device, and substrate processing apparatus | Naoya Miyashita, Koei KURIBAYASHI | 2024-08-20 |
| 12062546 | Substrate processing device, manufacturing method for semiconductor device, and reaction tube | Hidenari Yoshida, Shigeru Odake, Takayuki Nakada | 2024-08-13 |
| 11935762 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Daigi KAMIMURA, Kenji Shirako, Hironori Shimada, Akira HORII, Takayuki Nakada +1 more | 2024-03-19 |
| 11913116 | Substrate processing apparatus and method of manufacturing semiconductor device | Motoya Takewaki | 2024-02-27 |