Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12123091 | Substrate processing apparatus and method of manufacturing semiconductor device | Takashi Nogami, Tomoshi Taniyama, Daigi KAMIMURA | 2024-10-22 |
| 12107397 | Electric discharge device and electrode device | Yohei Ishigami, Takafumi Omori, Tetsunori Aono, Sadahiko Wakaba | 2024-10-01 |
| 12062546 | Substrate processing device, manufacturing method for semiconductor device, and reaction tube | Hidenari Yoshida, Shigeru Odake, Tomoshi Taniyama | 2024-08-13 |
| 11935762 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Daigi KAMIMURA, Tomoshi Taniyama, Kenji Shirako, Hironori Shimada, Akira HORII +1 more | 2024-03-19 |