Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11935762 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Daigi KAMIMURA, Tomoshi Taniyama, Kenji Shirako, Akira HORII, Takayuki Nakada +1 more | 2024-03-19 |
| D1017561 | Nozzle holder of substrate processing apparatus | — | 2024-03-12 |