Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12123091 | Substrate processing apparatus and method of manufacturing semiconductor device | Takayuki Nakada, Takashi Nogami, Tomoshi Taniyama | 2024-10-22 |
| 12116666 | Substrate processing apparatus and method of manufacturing semiconductor device | Takeshi Ito, Tomoshi Taniyama | 2024-10-15 |
| 11935762 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Tomoshi Taniyama, Kenji Shirako, Hironori Shimada, Akira HORII, Takayuki Nakada +1 more | 2024-03-19 |