Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12062546 | Substrate processing device, manufacturing method for semiconductor device, and reaction tube | Shigeru Odake, Tomoshi Taniyama, Takayuki Nakada | 2024-08-13 |
| 11990359 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Takatomo Yamaguchi, Kenji Ono | 2024-05-21 |
| 11952664 | Substrate processing apparatus and method of manufacturing semiconductor device | Takeo Hanashima, Hiroaki Hiramatsu | 2024-04-09 |
| 11898247 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Takafumi Sasaki, Yusaku OKAJIMA | 2024-02-13 |
| 11859280 | Substrate processing apparatus and method of manufacturing semiconductor device | Hidetoshi Mimura, Takafumi Sasaki, Yusaku OKAJIMA | 2024-01-02 |