Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11859280 | Substrate processing apparatus and method of manufacturing semiconductor device | Takafumi Sasaki, Hidenari Yoshida, Yusaku OKAJIMA | 2024-01-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11859280 | Substrate processing apparatus and method of manufacturing semiconductor device | Takafumi Sasaki, Hidenari Yoshida, Yusaku OKAJIMA | 2024-01-02 |