Issued Patents 2024
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D1042340 | Tubular reactor | — | 2024-09-17 |
| D1022904 | Tubular reactor | — | 2024-04-16 |
| D1022905 | Tubular reactor | — | 2024-04-16 |
| D1022906 | Tubular reactor | — | 2024-04-16 |
| D1022907 | Tubular reactor | — | 2024-04-16 |
| D1022933 | Wafer support of semiconductor manufacturing apparatus | — | 2024-04-16 |
| 11898247 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Hidenari Yoshida, Takafumi Sasaki | 2024-02-13 |
| 11859280 | Substrate processing apparatus and method of manufacturing semiconductor device | Hidetoshi Mimura, Takafumi Sasaki, Hidenari Yoshida | 2024-01-02 |