Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12053805 | Method of cleaning member in process container, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Koei KURIBAYASHI, Kenji Kameda, Tsukasa Kamakura, Takeo Hanashima, Hiroaki Hiramatsu +5 more | 2024-08-06 |
| 11980935 | Copper particles and method for producing same | Mizuki AKIZAWA | 2024-05-14 |
| 11898247 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Hidenari Yoshida, Yusaku OKAJIMA | 2024-02-13 |
| 11859280 | Substrate processing apparatus and method of manufacturing semiconductor device | Hidetoshi Mimura, Hidenari Yoshida, Yusaku OKAJIMA | 2024-01-02 |