Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12053805 | Method of cleaning member in process container, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Koei KURIBAYASHI, Tsukasa Kamakura, Takeo Hanashima, Hiroaki Hiramatsu, Shinya Ebata +5 more | 2024-08-06 |