Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11990359 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Takatomo Yamaguchi, Hidenari Yoshida | 2024-05-21 |
| 11961715 | Substrate processing apparatus, substrate retainer and method of manufacturing semiconductor device | Daisuke Hara, Takashi Yahata, Tsuyoshi Takeda, Kazuhiko Yamazaki | 2024-04-16 |