Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12094735 | Substrate processing apparatus, plurality of electrodes and method of manufacturing semiconductor device | Daisuke Hara | 2024-09-17 |
| 12068136 | Substrate processing apparatus, method of manufacturing semiconductor device, and plasma generator | — | 2024-08-20 |
| 11967490 | Plasma generating device, substrate processing apparatus, and method of manufacturing semiconductor device | Akihiro Sato, Yukitomo HIROCHI | 2024-04-23 |
| 11961715 | Substrate processing apparatus, substrate retainer and method of manufacturing semiconductor device | Daisuke Hara, Takashi Yahata, Kenji Ono, Kazuhiko Yamazaki | 2024-04-16 |