Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D1053156 | Furnace for substrate processing apparatus | Hideto Tateno, Daiki Kimoto | 2024-12-03 |
| 12053805 | Method of cleaning member in process container, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Koei KURIBAYASHI, Kenji Kameda, Tsukasa Kamakura, Takeo Hanashima, Hiroaki Hiramatsu +5 more | 2024-08-06 |
| 11990359 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Hidenari Yoshida, Kenji Ono | 2024-05-21 |