Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12085338 | Heater, temperature control system, and processing apparatus | Masaaki Ueno, Shinobu Sugiura, Masashi Sugishita | 2024-09-10 |
| 12050138 | Substrate processing apparatus, and thermocouple | Akihiro Osaka, Hideto Yamaguchi, Tokunobu Akao, Atsushi UMEKAWA, Motoya Takewaki | 2024-07-30 |