Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12085338 | Heater, temperature control system, and processing apparatus | Tetsuya Kosugi, Shinobu Sugiura, Masashi Sugishita | 2024-09-10 |
| 11906367 | Substrate temperature sensor, substrate retainer and substrate processing apparatus | Tokunobu Akao, Hitoshi Murata, Akinori Tanaka | 2024-02-20 |