Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11906367 | Substrate temperature sensor, substrate retainer and substrate processing apparatus | Tokunobu Akao, Akinori Tanaka, Masaaki Ueno | 2024-02-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11906367 | Substrate temperature sensor, substrate retainer and substrate processing apparatus | Tokunobu Akao, Akinori Tanaka, Masaaki Ueno | 2024-02-20 |