Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12053805 | Method of cleaning member in process container, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Koei KURIBAYASHI, Kenji Kameda, Tsukasa Kamakura, Takeo Hanashima, Hiroaki Hiramatsu +5 more | 2024-08-06 |
| 11967501 | Substrate processing apparatus and method of manufacturing semiconductor device | Hiroaki Hiramatsu, Takuro USHIDA | 2024-04-23 |