Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12100574 | Target and algorithm to measure overlay by modeling back scattering electrons on overlapping structures | Oliver Ache, Carey Phelps | 2024-09-24 |
| 12092966 | Device feature specific edge placement error (EPE) | Amnon Manassen, Frank Laske, Andrei V. Shchegrov | 2024-09-17 |
| 12055859 | Overlay mark design for electron beam overlay | Inna Steely-Tarshish, Stefan Eyring, Mark Ghinovker, Yoel Feler, Eitan Hajaj +4 more | 2024-08-06 |
| 12001148 | Enhancing performance of overlay metrology | Amnon Manassen, Andrew V. Hill, Yonatan Vaknin, Yossi Simon, Daria Negri +9 more | 2024-06-04 |
| 11862524 | Overlay mark design for electron beam overlay | Inna Steely-Tarshish, Stefan Eyring, Mark Ghinovker, Yoel Feler, Eitan Hajaj +4 more | 2024-01-02 |