Issued Patents 2024
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12092966 | Device feature specific edge placement error (EPE) | Amnon Manassen, Nadav Gutman, Frank Laske | 2024-09-17 |
| 12019030 | Methods and systems for targeted monitoring of semiconductor measurement quality | Antonio Arion Gellineau, Hyowon Park, Pavan Gurudath, Christopher Liman, Jung Heon Song | 2024-06-25 |
| 11990380 | Methods and systems for combining x-ray metrology data sets to improve parameter estimation | Christopher Liman, Antonio Arion Gellineau, Sungchul Yoo | 2024-05-21 |
| 11913874 | Optical metrology tool equipped with modulated illumination sources | Lawrence D. Rotter, David Y. Wang, Andrei Veldman, Kevin Peterlinz, Gregory Brady +1 more | 2024-02-27 |
| 11899375 | Massive overlay metrology sampling with multiple measurement columns | Jonathan M. Madsen, Amnon Manassen, Andrew V. Hill, Yossi Simon, Gilad Laredo +1 more | 2024-02-13 |
| 11880142 | Self-calibrating overlay metrology | Stilian Ivanov Pandev, Min-Yeong Moon, Jonathan M. Madsen, Dimitry Sanko, Liran Yerushalmi +2 more | 2024-01-23 |