Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12019030 | Methods and systems for targeted monitoring of semiconductor measurement quality | Antonio Arion Gellineau, Andrei V. Shchegrov, Hyowon Park, Pavan Gurudath, Jung Heon Song | 2024-06-25 |
| 11990380 | Methods and systems for combining x-ray metrology data sets to improve parameter estimation | Antonio Arion Gellineau, Andrei V. Shchegrov, Sungchul Yoo | 2024-05-21 |